A fixed-gap, longitudinal motion, variable-capacitor actuator (as the one of Figure 4.11) is connected in an electrical circuit with a sinusoidal voltage source, as sketched in Figure 9.34. Knowing the gap g = 2 nm, the capacitor plate width w = 30 nm, the air permittivity f = 8.8 # 10−12 F/m, the resistance R = 0.2 X, and the inductance L = 10 F, plot the frequency response using MATLAB® and applying the complex transfer function approach for two superposition lengths of the capacitor armatures: x1 = 10 nm and x2 = 15 nm. Calculate analytically and evaluate graphically the peak magnitude response for the two cases.
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